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微电子机械系统(MEMS)技术是半导体微电子学的创新,利用Si基集成电路的平面工艺从两维加工向三维加工发展,开创了MEMS新的领域。综述并分析了与信息产业以及移动网络相关的MEMS主流产品(加速度计、陀螺仪、微麦克风、数字微镜器件(DMD)、喷墨头和RF MEMS)的技术发展现状和趋势,同时预测了MEMS新兴产品(光滤波器、微小电子鼻、微扬声器、微超声器、微能量采集器和纳机电系统(NEMS))的科研现状和面临的技术挑战。从当前世界MEMS技术发展的特点(系统集成、与CMOS工艺结合走向标准加工、纳米制造与微米、纳米融合和多应用领域扩展)出发,结合国内MEMS技术发展的现状,提出我国MEMS技术发展的建议。
Microelectromechanical systems (MEMS) technology is a semiconductor microelectronics innovation, the use of Si-based integrated circuit planar process from two-dimensional processing to three-dimensional processing, creating a new field of MEMS. This paper reviews and analyzes the status quo and trends of the technology development of MEMS mainstream products (accelerometers, gyroscopes, microphones, digital micromirror devices (DMDs), inkjet heads and RF MEMS) related to the information industry and mobile networks. Research status and technical challenges of MEMS emerging products (optical filters, microelectronic nose, micro speakers, micro-sonicators, micro energy harvesters and nanoelectromechanical systems (NEMS)). Starting from the characteristics of MEMS technology in the world today (system integration, combination with CMOS process, standard manufacturing, nanometer manufacturing and micron, nanometer integration and multi-application fields), combined with the development of MEMS technology in China, the paper proposes the development of MEMS technology in China .