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为解决掺杂引起的二氧化钒薄膜的红外调制幅度下降以及二氧化钒复合薄膜相变温度需要进一步降低等问题,采用纳米结构、掺杂改性和复合结构等多种机理协同作用的方案,利用共溅射氧化法,先在石英玻璃上制备高(002)取向的Zn O薄膜,再在Zn O层上室温共溅射沉积钒钨金属薄膜,最后经热氧化处理获得双层钨掺杂W-VO2/Zn O纳米复合薄膜.利用X射线衍射、X射线光电子能谱、扫描电镜和变温光谱分析等对薄膜的结构、组分、形貌和光学特性进行了分析.结果显示,W-VO2/Zn O纳米复合薄膜呈花状结构,取向性提高,在保持掺杂薄膜相变温度(约39?C)和热滞回线宽度(约6?C)较低的情况下,其相变前后的红外透过率差量增加近2倍,热致变色性能得到协同增强.
In order to solve the problem of the decrease of the infrared modulation amplitude of the vanadium dioxide film caused by doping and the need of further reducing the phase transition temperature of the vanadium dioxide composite film, a scheme of synergetic effect by adopting various mechanisms such as nano-structure, doping modification and composite structure, Co-sputtering oxidation method was used to prepare a high-oriented (002) -oriented ZnO film on quartz glass and co-sputter-deposited vanadium-tungsten metal film on the ZnO layer at room temperature. Finally, double-layered tungsten doping The structure, composition, morphology and optical properties of W-VO2 / ZnO nanocomposite films were analyzed by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy and temperature- The VO2 / ZnO nanocomposite films showed a flower-like structure with improved orientation. While keeping the phase transition temperature of doping film (about 39? C) and the width of thermal hysteresis loop (about 6? C) low, Before and after the change in the infrared transmittance difference increased nearly 2 times, the thermochromic performance synergistic enhancement.