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在光学系统中应用非球面元件可以增加光学设计的灵活性,改善光学系统成像质量,提高光学性能,极大地减小光学系统的外形尺寸和质量。通过深入分析轴对称非球面精密磨削成型过程的加工特性,以及工艺过程中的刀具与工件弹性变形、刀具半径误差、轴向对刀误差等主要加工误差因素的成因,建立了刀具与工件变形量模型、刀具半径误差补偿理论模型及轴向对刀误差校正方法,并将其运用到非球面精密磨削成型与抛光加工过程中。由实验可知:通过误差补偿与校正,加工时间节省了60%以上,Φ51.5mm口径非球面抛光后的面形精度PV值为0.15μm(0.237λ),RMS值达到0.023μm(0.036λ),满足加工精度要求。实验验证了理论分析及误差补偿方法的正确性,实现了轴对称非球面光学零件的快速加工与检测。
The use of aspherical elements in optical systems increases the flexibility of optical design, improves the imaging quality of the optical system, improves the optical performance, and greatly reduces the size and quality of the optical system. By analyzing the processing characteristics of the precision grinding process of the aspheric surface and the causes of the main machining errors such as the tool deformation and the workpiece elastic deformation, the tool radius error and the axial alignment error, the deformation of the tool and the workpiece is established The model of the tool radius error compensation theoretical model and the axial tool alignment error correction method and apply it to the aspheric surface precision grinding and polishing process. The experimental results show that the processing time is saved by 60% through error compensation and correction, and the surface shape accuracy of 0.15mm (0.237λ) and 0.023μm (0.036λ) after Φ51.5mm diameter aspheric surface polishing is achieved. Meet the machining accuracy requirements. The correctness of the theoretical analysis and the error compensation method is verified by experiments, and the rapid machining and testing of the axisymmetric aspheric optical components are realized.