本文介绍了自硅石制备单晶硅的生产链,即电弧炉中还原硅石获得工业硅,用三氯氢硅法或硅烷法制备多晶硅,再用坩埚直拉法或区域熔炼法制备电子工业超纯晶体硅——单晶硅,包括较为详尽的生产方法和工艺流程。 This paper describes the production of single crystal silicon from silica production chain, that is, the reduction of silica in an electric arc furnace to obtain industrial silicon, trichlorosilane or silane prepared polycrystalline silicon, and then the crucible Czochralski method or the regional melting of ultrapure Crystalline silicon - monocrystalline silicon, including a more detailed production methods and processes.