一、概况自从莫尔条纹技术在计量、测定、自动控制等各个技术领域广泛应用以来,计量光栅的需要量与日俱增,精度的要求也在不断提高。于是人们对提高光栅的制作精度和效率,进行了各种试验研究,从而使计量光栅制造技术得到了迅速的发展。在50年代初,英国制造长光栅一般采用梅顿法,制得的是闪耀光栅,因而取得的光电讯号强,讯号质量好,便于电子学处理。到60年代中,由于光敏元件质量和电子插补技术的提高,因而可用黑白光栅代替闪耀光栅,这样各国较多地采用光学优生法制造照相光栅,这大大提高了生产效率,并也提高了精度。目前,由于光栅制造技术及检测方法有了 I. Overview Since Moiré fringe technology has been widely used in various technical fields such as measurement, measurement, automatic control and so on, the demand for metrological grating has been increasing day by day, and the requirements for accuracy have also been constantly increasing. So people to improve the production of grating precision and efficiency, conducted a variety of experimental studies, so that the metering grating manufacturing technology has been rapid development. In the early 1950s, the United Kingdom made long gratings generally use the Metton method, the system is made of blazed grating, resulting in strong optical signals, good signal quality, easy to electronic processing. By the mid-1960s, black-and-white gratings could be substituted for blazed gratings due to the improved quality of the photosensitive elements and the electronic interpolation technique, which led to the increased use of optical pregrancing methods in many countries to produce photographic gratings, greatly improving production efficiency and improving accuracy . At present, due to grating manufacturing technology and testing methods have