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本文提出了一种基于双层弯曲热微执行器的新颖的调谐方式,太赫兹带阻滤波器采用波导加载金属块的形式。双层弯曲热微执行器驱动金属膜片移动,利用可动金属膜片改变波导中加载金属块周围的电磁场分布达到调谐的目的。设计了一款中心频率为275.1 GHz的可调带阻滤波器,仿真结果显示,双层弯曲热微执行器产生180μm位移时,滤波器实现了中心频率23.2 GHz的调谐范围,反射衰减由24.7 d B变化到15.9 d B。
In this paper, we propose a novel tuning method based on a bimodal curved micro-actuator. The THz band-stop filter uses a waveguide-loaded metal block. The bimodal curved micro-actuator drives the movement of the metal diaphragm, and uses the movable metal diaphragm to change the distribution of the electromagnetic field around the loaded metal block in the waveguide to achieve the tuning. A tunable band-stop filter with a center frequency of 275.1 GHz is designed. The simulation results show that the filter achieves a tuning range of 23.2 GHz at a center frequency of 180 μm when the birefringent thermal micro-actuator displaces 180 μm. The reflection attenuation decreases from 24.7 d B changes to 15.9 d B.