高精度硅压力传感器电子部东北传感技术研究所新近研制出一种高精度硅压力传感器，并已通过了专家技术鉴定。它是根据硅材料的压阻效应，采用微机械加工技术、微电子技术及微结构键合技术制成的一种压力传感组件和调理电路组件一体化的压阻式传感器。同时，在调试过程中还... High-precision silicon pressure sensor Electronics Northeast Institute of Sensing recently developed a high-precision silicon pressure sensor, and has passed the technical expert identification. It is based on the piezoresistive effect of silicon materials, the use of micro-machining technology, micro-electronics and micro-structure bonding technology made of a pressure sensing components and conditioning circuit components integrated piezoresistive sensor. At the same time, in the process of debugging also ...