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Ge单晶衬底上制成的化合物太阳能电池,被越来越广泛地应用于空间太阳能领域,超薄Ge抛光的机械强度也越来越受到人们的关注。介绍了一种测试超薄Ge单晶抛光片机械强度的方法。研究了加工工艺对超薄Ge单晶抛光片机械强度的影响,同时指出在太阳电池用超薄Ge单晶抛光片的加工过程中,切割、研磨、磨削、化学腐蚀、抛光等工序对超薄Ge单晶抛光片的机械强度均有着不同程度的影响。研究表明,通过调整磨削砂轮砂粒粒径、化学腐蚀去除厚度和抛光速率等工艺参数,能够有效控制超薄Ge单晶抛光片的机械强度。
Ge single crystal substrate made of compound solar cells, is more and more widely used in the field of space solar energy, ultra-thin Ge polished mechanical strength is also more and more people’s attention. A method to test the mechanical strength of ultra-thin Ge single crystal polishing sheets is introduced. The influence of processing technology on the mechanical strength of ultra-thin Ge single crystal polishing wafer was also studied. At the same time, it was pointed out that during the process of ultra-thin Ge single crystal polishing wafer for solar cells, the processes of cutting, grinding, grinding, chemical etching, The mechanical properties of thin Ge single crystal wafers have different degrees of influence. The research shows that the mechanical strength of the ultra-thin Ge single crystal polishing sheet can be effectively controlled by adjusting the grain size of the grinding wheel, the chemical etching thickness and the polishing rate.