论文部分内容阅读
用Q开关YAG激光器的1.06μm的脉冲激光在硅及玻璃衬底上沉积了氮化硼薄膜。做了SEM,XRD,红外透射谱和紫外一可见透射谱等测试。确认为六方氮化硼(h-BN)薄膜.并测出其禁带宽度、晶格常数等。
Boron nitride films were deposited on silicon and glass substrates using a 1.06 μm pulsed laser using a Q-switched YAG laser. The SEM, XRD, infrared transmission spectrum and UV-visible transmission spectrum were tested. Confirmed as hexagonal boron nitride (h-BN) film. And measured its forbidden band width, lattice constant and so on.