有无CUSP磁场时提拉法生长单晶硅的传热及氧运输的数值模拟

来源 :中国化学工程学报(英文版) | 被引量 : 0次 | 上传用户:reap
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Simulations of heat transfer and oxygen transport during a Czochralski growth of silicon with and without a cusp magnetic field were carried out. A finite volume method with a low-Reynolds number K-ε model proposed by Jones-Launder was employed. The numerical results were compared with the experimental data in the literature. It is found that the calculated results are in good agreement with the experimental data.
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