本文提供了四极质谱计ATLAS-AMP 3对六种气体:N_2、Ar、H_2、O_2、CH_4和H_2O的测量特性的校准数据。在校准过程中,气体分压强的测量,采用以电容薄膜规为标准规来校准BA型电离规,并由BA规来测量。实验结果表明:在高的次级电子倍增电压下,各种气体的质谱碎片峰信号与主峰信号比值才趋于常数;气体分压强与主峰输出信号的比值随次级电子倍增电压增大而急剧减少。 This article provides calibration data for the quadrupole mass spectrometer ATLAS-AMP 3 for the measurement of six gases: N_2, Ar, H_2, O_2, CH_4 and H_2O. In the calibration process, the partial pressure of gas measurement, the use of capacitance film gauge to calibrate the BA type ionization gauge, and by the BA gauge to measure. The experimental results show that the ratio of the gas partial pressure to the main peak output signal increases sharply with the secondary electron multiplication voltage under the high secondary electron multiplying voltage. cut back.