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用真空阴极过滤电弧法沉积了厚度为2 nm的类金刚石(DLC)薄膜,研究了激光加热退火时薄膜结构和表面粗糙度的变化,分析了激光加热功率对薄膜结构的影响。结果表明,当激光功率小于200 mW时,DLC薄膜的结构基本保持不变;激光功率增大到300 mW,薄膜中少量的sp3键转变为sp2键,但薄膜的表面形貌基本保持不变。随着激光功率增大到400mW,薄膜中sp3键向sp2键的转变量增大;当激光功率达到500 mW时,薄膜中大量的sp3键转变为sp2键,sp2六原子环含量迅速增大,薄膜表面粗糙度开始明显增大,出现凹凸不平的表面形貌。
The DLC film with a thickness of 2 nm was deposited by vacuum cathodic filtration arc method. The structure and surface roughness of the films were investigated by laser annealing. The influence of laser heating power on the film structure was analyzed. The results show that when the laser power is less than 200 mW, the structure of DLC film remains unchanged. When the laser power is increased to 300 mW, a small amount of sp3 bonds are changed into sp2 bonds, but the surface morphology of the films remains unchanged. As the laser power increases to 400mW, the amount of sp3 bond to sp2 bond in the film increases. When the laser power reaches 500 mW, a large number of sp3 bonds in the film are changed to sp2 bonds, the content of sp2 six-atom ring increases rapidly, Film surface roughness began to significantly increase the appearance of rugged surface morphology.