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利用电弧离子镀技术在不锈钢基体上沉积了Ti-Al-N涂层,研究了沉积工艺参数对沉积态涂层的成分及相组成的影响,以及在不同退火处理条件下各涂层组织的变化.XRD结果表明,通过改变沉积工艺参数可以控制沉积态涂层的成分,使涂层经退火后生成Ti_2AlN相.适当成分的沉积态涂层退火生成Ti_2AlN相所需的最低退火温度为650℃,其它沉积态涂层在700℃或更高温度下退火才能生成Ti_2AlN相;退火过程中可能发生的化学反应为:AlTi_3N+5Al→TiN+2Al_3Ti和AlTi_3N+3Al→Ti_2AlN+Al_3Ti.此外,延长退火时间可使相同工艺下的沉积涂层生成的Ti_2AlN相含量略有增加.利用SEM对涂层进行了分析,测量了涂层的摩擦系数.
The Ti-Al-N coating was deposited on a stainless steel substrate by arc ion plating. The effects of deposition parameters on the composition and phase composition of the as-deposited coating were investigated. The changes of the coating composition under different annealing conditions XRD results show that the composition of the as-deposited coating can be controlled by changing the deposition parameters and the Ti_2AlN phase is formed after the coating is annealed.The minimum annealing temperature required for the deposition of Ti_2AlN phase for the deposited coating is 650 ℃, The other deposited coatings can be annealed at 700 ℃ or higher to form Ti_2AlN phase. The possible chemical reactions during the annealing process are: AlTi_3N + 5Al → TiN + 2Al_3Ti and AlTi_3N + 3Al → Ti_2AlN + Al_3Ti. In addition, the annealing time The content of Ti 2 AlN phase deposited by the same process can be slightly increased.The coating was analyzed by SEM and the friction coefficient of the coating was measured.