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The analyses of MEMS gyroscope interface circuit on thermal noise, 1/f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the noise. The interface chip is implemented in a standard0.5 μm CMOS process. The test results show that the resolution of sensitive capacity can reach to 6.47×10~(-20) F at the bandwidth of 60 Hz. The measuring range is ± 200°/s and the nonlinearity is 310 ppm. The output noise density is 5.8°/(h·(Hz)~(1/2)). The angular random walk(allen-variance) is 0.092°/h~(1/2) and the bias instability is 2.63°/h.
The analyzes of MEMS gyroscope interface circuit on thermal noise, 1 / f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the the interface chip is implemented in a standard 0.5 μm CMOS process. The test results show that the resolution of sensitive capacity can reach 6.47 × 10 -20 F at the bandwidth of 60 Hz. The measuring range is ± 200 ° / s and the nonlinearity is 310 ppm. The output noise density is 5.8 ° / (h · (Hz) -1/2). The angular random walk (allen-variance) is 0.092 ° / h ~ / 2) and the bias instability is 2.63 ° / h.