Both the size of the components and the separation between them in some microelectromechanical systems (MEMS) are already in the sub-micrometer regime, where quantum mechanical effects such as the Casimir effect will need to be considered. This paper theoretically analyzes the roughness, electrical conductivity, and temperature corrections due to the Casimir force between two parallel polysilicon plates. The theoretical results show that the combined effects of roughness, conductivity and temperature cause a maximum relative error of the Casimir force per unit area of 26.2% between parallel polysilicon plates separated by 1 μm. Therefore, the surface roughness and finite conductivity corrections should be taken into account when calculating precise Casimir forces with separations on the order of 1 μm. Both the size of the components and the separation between them in some microelectromechanical systems (MEMS) are already in the sub-micrometer regime, where quantum mechanical effects such as the Casimir effect will need to be considered. This paper theoretically analyzes the roughness, electrical conductivity, and temperature corrections due to the Casimir force between two parallel polysilicon plates. The theoretical results show that the combined effects of roughness, conductivity and temperature cause a maximum relative error of the Casimir force per unit area of ​​26.2% between parallel polysilicon plates separated by 1 μm. Therefore, the surface roughness and finite conductivity corrections should be taken into account when calculating precise Casimir forces with separations on the order of 1 μm.