论文部分内容阅读
介绍了玻璃基板上激光微细熔覆柔性直写电阻的基本原理及其工艺,系统地研究了各工艺参数的变化对电阻阻值的影响规律。通过热作用、激光与物质的相互作用原理理论分析了电阻膜的形成以及组织、结构、性能间的关系,确立了制备电阻的最佳工艺参数和获得高精度、小误差电阻阻值测试的最佳方法。结果表明,采用该技术可以在无掩膜下通过调节电阻的形状、大小、体积以及激光加工参数,一步完成所需高精度、高质量、高性能电阻元件的制备和修复,不需要电阻的微调,工艺简单、灵活、速度快、成本低,具有广阔的应用前景。
The basic principle and process of laser micro-cladding flexible direct write resistance on glass substrate are introduced. The influence of various process parameters on the resistance is systematically studied. The relationship between the formation of the resistive film and the microstructure, structure and properties was analyzed theoretically by the interaction of heat and laser with the material, and the best process parameters for the preparation of the resistor and the highest accuracy and small error resistance were obtained Good method. The results show that this technique can be used to prepare and repair the required high precision, high quality and high performance resistive elements in one step without mask by adjusting the shape, size, volume and laser processing parameters of the resistors without the need for trimming of the resistors , Process is simple, flexible, fast, low cost, has broad application prospects.