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针对以新型材料石墨烯为膜片的光纤法珀压力传感器,应用圆薄膜大挠度弹性理论,利用有限元法分析了均布载荷下石墨烯膜的挠度形变;并基于Fabry-Perot干涉仪原理,建立了光纤Fabry-Perot腔压力传感的数学模型.根据石墨烯膜折射率特性,分析了层数、入射光角度等参数对石墨烯膜反射率的影响,获取了腔长损耗以及薄膜挠度形变导致腔长变化而引起的干涉光谱变化规律.仿真结果表明,增加薄膜层数可提高反射率、改善干涉性能;但随着载荷增加,其对挠度形变的影响表现为反向递减效应.8层石墨烯薄膜可获得0.715%的反射率,且当腔长为40μm时,直径25μm薄膜的理论压力灵敏度约为10 nm/k Pa.这为基于多层石墨烯的膜片式光纤压力传感器的设计提供了理论依据.
For the Fabry-Perot interferometer, a fiber-optic Fabry-Perot sensor with graphene as a new type of material was used to analyze the deflection deformation of graphene films under uniform load using the large-deflection membrane elasticity theory. The mathematical model of fiber Fabry-Perot cavity pressure sensing is established.According to the refractive index of graphene film, the influence of parameters such as the number of layers and the angle of incident light on the reflectivity of graphene film is analyzed, and the loss of cavity length and the deformation of film Which leads to the change of interference spectrum caused by the variation of the cavity length.The simulation results show that increasing the film thickness can improve the reflectivity and improve the interference performance.But with the increase of load, The graphene film achieves a reflectivity of 0.715%, and when the cavity length is 40μm, the theoretical pressure sensitivity of a 25μm diameter film is about 10 nm / kPa. This is the design of the multilayer graphene based fiber optic pressure sensor Provided a theoretical basis.