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对影响压阻式传感器性能的诸多因素进行了分析,对于压阻式加速度传感器的结构特性、工作原理进行了介绍。压阻式传感器是一种专用传感器信号处理器,它可以补偿温度误差和非线性误差,使传感器的精度达到0.5‰以内。阐述了压阻式传感器自补偿的原理,并通过公式逐步描述了其补偿的步骤和作用。通过实验结果可以看出,该传感器的非线性误差很小,性能优越,灵敏度较高。
The factors affecting the performance of piezoresistive sensors are analyzed. The structural characteristics and working principle of piezoresistive accelerometers are introduced. Piezoresistive sensor is a special sensor signal processor, which can compensate for temperature and nonlinear error, the accuracy of the sensor to 0.5 ‰ less. The principle of piezoresistive sensor self-compensation is expounded, and the steps and effects of compensation are described step by step. It can be seen from the experimental results that the nonlinearity of the sensor is small, the performance is superior and the sensitivity is higher.