数值研究了非相干光反馈时半导体激光器输出功率随反馈系数的变化关系以及待测物体离焦量与反馈系数的关系。提出了基于非相干光反馈的表面轮廓测量系统,并实验验证了系统的可行性,完成了对一元硬币的二维平面扫描成像,并分析了实验结果中的误差以及可能影响测量结果的主要因素。 The relationship between the output power of semiconductor laser with feedback coefficient and the defocus amount and the feedback coefficient of the object to be measured are numerically investigated. The surface profile measurement system based on incoherent optical feedback is proposed. The feasibility of the system is verified by experiments. The 2D planar scanning imaging of one dollar coin is completed. The errors in the experimental results and the main factors that may influence the measurement results are analyzed .