Deposition and Characterization of (Ba, Sr)RuO3 Oxide Electrode Using TMHD-Based Single Cocktail Sou

来源 :中国稀土学报：英文版 | 被引量 : 0次 | 上传用户：yanweiwch

【摘要】

：

(Ba, Sr)RuO3 has been paid an attention as a promising electrode for (Ba, Sr)TiO3 dielectric material due to its similarity in structure and chemical compositio

【作者】

：

Hyun Chul Kim Kyung Il Hong Yo

【机构】

：

DepartmentofCeramicEngineering

【出处】

：

中国稀土学报：英文版

【发表日期】

：

2004年z2期

【关键词】

：

(Ba Sr)RuO3 (Ba Sr)TiO3 MOCVD liquid delivery system(LDS) NOZZLE type INJECTOR

【基金项目】

：

Project supped by the Korea Institute of Science and Technology Evaluation and Planning (KISTEP) through the National Research Laboratory (NRL) program in the year of 2002

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(Ba, Sr)RuO3 has been paid an attention as a promising electrode for (Ba, Sr)TiO3 dielectric material due to its similarity in structure and chemical composition with BST. In this study, (Ba, Sr)RuO3 conductive oxide film was deposited on a 4 inch p-type

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Deposition and Characterization of (Ba, Sr)RuO3 Oxide Electrode Using TMHD-Based Single Cocktail Sou

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