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一概述微机电系统（ＭｉｃｒｏＥｌｅｃｔｒｏ－Ｍｅ－ｃｈａｎｉｃａｌ Ｓｙｓｔｅｍｓ，ＭＥＭＳ）是指可批量制作的；集微型机构、微型传感器、微型执行器以及信号处理和控制电路、直至接口、通信和电源等于一体的微型器件或系统。ＭＥＭＳ是随着半导体集成电路微细加工技
An Overview MEMS (MicroElectro-Me-chanical Systems) refers to the mass production of micro-devices, micro-sensors, micro-actuators and signal processing and control circuits, until the interface, communication and power supply unitary micro-devices Or system. MEMS is micro-machined with semiconductor integrated circuits