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通过高精度压力传感器、薄膜温敏传感器和管式应变计传感器的电子束封装焊接实践,讨论了电子束焊在超薄精密传感器封装焊接中需要注意的工艺因素。
The high-precision pressure sensor, thin-film temperature-sensitive sensor and tube strain gauge sensor welding electron beam packaging practice, discussed the electron beam welding ultra-thin precision sensor package welding process factors need attention.