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采用磁控溅射方法在航天器常用材料聚酰亚胺(Kapton)表面沉积无机氧化物涂层(TiO2和SiO2),来提高材料的抗原子氧剥蚀性能.通过选择试验材料和参数,优化了沉积涂层的工艺,以克服容易产生裂纹的缺点.对材料进行了原子氧效应地面模拟试验,结果表明,在Kapton上沉积涂层后,质量损失下降了2个数量级.另外,有涂层的Kapton表面基本没有变化并且没有出现裂纹.其中,TiO2由于热膨胀系数更接近Kapton,比SiO2的防护效果更好.
The magnetron sputtering method was used to deposit the inorganic oxide coating (TiO2 and SiO2) on the surface of Kapton, a common material for spacecraft, to improve the anti-oxygen and oxygen-ablation properties of the material. By selecting the test materials and parameters, Deposition coating process to overcome the shortcomings of easy to produce cracks on the material by the atomic oxygen effect of the ground simulation test results showed that the coating deposited on the Kapton, the quality loss decreased by two orders of magnitude.In addition, coated The surface of Kapton showed almost no change and no cracks appeared, of which TiO2 was more protective than SiO2 due to its closer coefficient of thermal expansion to Kapton.