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研究了线圈、多极混合磁位形ECR等离子体及刻蚀特性。静电探针测量结果表明，在φ200mm，φ100mm范围内等离子体离子流强径向不均匀性为±21．5％，±5．3％。4英寸片片内刻蚀不均匀性≤±0．5％，0．25μm线宽刻蚀方向性为0．75。并结合等离子体特性及刻蚀机理，对有关结果进行了分析。
The ECR plasma and etching characteristics of coil, multipole hybrid magnetic configuration were investigated. Electrostatic probe measurements show that in the φ200mm, φ100mm range of plasma ion current strong radial inhomogeneity of ± 21.5%, ± 5.3%. 4-inch piece of film within the uneven etching ≤ ± 0.5%, 0.25μm linewidth etching direction of 0.75. Combined with the plasma characteristics and etching mechanism, the results were analyzed.