论文部分内容阅读
静电放电对电子工业生产的不良影响及对IC等微电子组件造成的损害已被人们广泛认识并引起重视。 1.静电产生与危害 通过实验可以知道,微电子生产环境中静电产生方式主要有以下三种。 (1)物体相互摩擦分离 很多绝缘表面,像塑料包装容器、电子元器件塑封(树脂封装)表面、工作服、工作台、操作工具等都可因摩擦分离产生静电。上述物体产生静电所带正或负电压决定于不同物体摩擦起电序列(见表1)。
Electrostatic discharge on the electronics industry, the adverse effects and the IC and other microelectronic components caused damage has been widely recognized and attracted attention. 1. Static electricity generation and harm Through the experiment we can know that there are three main ways of generating static electricity in the microelectronics production environment. (1) Objects rub against each other Separation of many insulating surfaces, such as plastic packaging containers, electronic components plastic (resin package) surface, overalls, workbenches, operating tools, etc. can be generated due to electrostatic friction. The positive or negative voltage generated by the static electricity generated by these objects depends on the triboelectric series of different objects (see Table 1).