论文部分内容阅读
用致冷机工作的低温泵证明在研究和发展中是十分成功的。同普通真空泵相比，这种低温系统具有抽速大，获得无碳氢物真空、工作范围宽和操作成本低的优点。Ｋ２０型双级致冷机同在冷凝和吸附下抽气的低温泵组合在一起。本文讨论了这种泵的结构和性能。通过商用镀膜机的操作，测出了泵对氮、氢和水蒸汽的抽速以及容器压力对抽气时间和抽降周期数的曲线关系。测量结果表明，这种冷凝和吸附面设计合理的低温泵大大地超过了今天所使用的各种类型泵。
Cryogenic pumps that work with chillers prove very successful in research and development. Compared to conventional vacuum pumps, this cryogenic system offers the advantages of high pumping speed, no hydrocarbon vacuum, wide operating range and low operating cost. The K20 dual-stage cooler is combined with a cryogenic pump that extracts air under condensation and adsorption. This article discusses the structure and performance of this pump. Through the operation of the commercial coating machine, the pumping speed of nitrogen, hydrogen and water vapor and the relationship between the pressure of the container and the pumping time and pumping cycle were measured. The results show that the cryogenic pump, which has a well designed condensing and sorption surface, greatly exceeds the types of pumps used today.