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荧光相关光谱(FCS)用于研究化学机械平坦化研磨液中添加剂-磨料粒子间的相互作用。通过添加剂和荧光探针分子,Alexa fluor 546(A546)在二氧化硅磨料粒子表面的竞争性吸附作用性质的描述,FCS提供了添加剂和磨料粒子间粘合的数量测定。胶态二氧化硅上吸附苯并三唑(BTA)的分析确认,A546被附加的BTA取代。但是,乙氨酸增强了胶态二氧化硅对A546的吸附。也证明了FCS是检测CMP工艺中使用的不同类型胶态二氧化硅磨料粒子间表面化学成分差异的灵敏技术。
Fluorescence correlation spectroscopy (FCS) was used to study the interaction between abrasive particles in chemical mechanical planarization slurry. By the description of the competitive adsorption properties of additives and fluorescent probe molecules, Alexa Fluor 546 (A546) on the surface of silica abrasive particles, FCS provides a quantitative determination of the adhesion of additives and abrasive particles. Analysis of benzotriazole (BTA) adsorbed on colloidal silica confirmed that A546 was replaced with additional BTA. However, tyrosine enhanced colloidal silica adsorption to A546. It has also been demonstrated that FCS is a sensitive technique for detecting differences in the chemical composition of the surfaces between different types of colloidal silica abrasive particles used in CMP processes.