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基于悬臂梁的谐振气体传感器可以通过测量悬臂梁谐振频率的偏移而检测相应气体分子.本文介绍了一种使用自激励自检测(SAD)电路驱动单端口多模态微悬臂梁的智能谐振式气体传感器.这种激励模式简化了悬臂梁结构和微加工过程.另外,还可以通过便捷地改变悬臂梁谐振模态实现大量程的气体浓度检测.通过仿真分析了不同模态下悬臂梁的模型和敏感度.通过测量这种基于单端口多模态悬臂梁的气体传感器对于气体的响应情况,展示了这种多模态SAD系统以及其改变模态增加测量量程的功能.
The resonant gas sensor based on cantilever can detect the gas molecules by measuring the resonance frequency of the cantilever beam.This paper introduces a smart resonant type of single-port multi-mode micro-cantilever beam driven by self-excitation self-test (SAD) Gas sensor.The excitation mode simplifies the cantilever structure and micromachining process.Moreover, the cantilever beam resonance mode can be easily changed to achieve a large range of gas concentration detection.The simulation analysis of the cantilever beam model under different modalities And Sensitivity By measuring the gas response of a single-port, multi-modal cantilever gas sensor, this multi-modal SAD system and its ability to change modes to increase the measurement range are demonstrated.