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用TiCl4作为反应气体制备PCVDTiN镀层，对降低界面的氧含量，改善PCVDTiN镀层的界面性能进行了研究。在镀层制备过程中增加了界面制备过程，即采用氩离子轰击以及氢的反应使界面的氯含量降低，膜基界面得到改善。结果表明，与常规PCVD制备的TiN镀层相比，膜层的结合强度有大幅度的提高，耐磨性和耐蚀性均有改善，特别是其耐蚀性达到甚至超过奥氏体不锈钢的水平。
PCVDTiN coating was prepared by using TiCl4 as reaction gas, and the interfacial properties of PCVDTiN coating were studied by reducing the oxygen content in the interface and improving the PCVDTiN coating. During the preparation of the coating, the interface preparation process is increased, that is, the argon content and the reaction of hydrogen reduce the chlorine content of the interface and the interface of the film-based substrate is improved. The results show that compared with the conventional PCVD prepared TiN coating, the film bonding strength has greatly improved, wear resistance and corrosion resistance are improved, especially its corrosion resistance reaches or exceeds the level of austenitic stainless steel .