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为了提高Cr2O3陶瓷薄膜的韧性及摩擦学性能,设计制备了Cr/Cr2O3软硬交替的多层薄膜,通过复配韧性层提高Cr2O3陶瓷薄膜的韧性及摩擦学性能,同时研究了调制周期对Cr/Cr2O3薄膜力学性能及摩擦学性能的影响.研究结果表明多层薄膜的韧性和第一临界载荷随调制周期的减小而增大,而其硬度随调制周期的减小而降低.调制周期为1 075 nm的薄膜表现出了最好的综合性能,即薄膜具有较好的膜基结合强度、较高的韧性和硬度,同时薄膜具有最好的抗磨损性能.
In order to improve the toughness and tribological properties of the Cr2O3 ceramic film, a multi-layer film of Cr / Cr2O3 alternating with hard and soft was designed and prepared. The toughness and tribological properties of the Cr2O3 ceramic film were improved by compounding the tough layer. Meanwhile, Cr2O3 thin films.The results show that the ductility and the first critical load increase with the decrease of the modulation period and the hardness decreases with the decrease of the modulation period.The modulation period is 1 075 nm film showed the best overall performance, that is, the film has better film-based bonding strength, high toughness and hardness, while the film has the best wear resistance.