A novel algorithmic method for piezoresistance calculation

来源 :Journal of Semiconductors | 被引量 : 0次 | 上传用户:fanybul8899
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistan ce on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance △R/R through an integral(the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object)and compare the theoretical values with the experimental results.Compared with the traditional method,this novel calculation method is moreaccurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor. A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance ce ce on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR / R through an integral (the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object) and compare the theoretical values ​​with the experimental results. Compared with the traditional method, this novel calculation method is moreaccurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor.
其他文献
尊敬的读者朋友:为了更好的提供给您实用、和有价值的信息,我们希望能得到您的信息反馈,所有参与调查的读者都将成为中国自动化网“读者俱乐部”会员,同时免费赠送三期《自动
1王震晚年曾高兴地回忆 说:“我平生下过的命令有无数道,但最满意的是给士兵下令放假找老婆,找不到的不准回来!” 1958年,在王震将军的动员和率领下,10万转业官兵来到北大荒
近年来,我区结合在领导班子和领导干部中开展的实绩考核工作,将国有企业党建工作纳入实绩考核工作之中,较好地解决了国有企业党建工作中面临的一些难题。通过对20多家国有企
该文利用诊断分析详细讨论了海温异常(SSTA)及其变化趋势(SSTVA)的时空特征及两者在热带内外海气相互作用中贡献的大小;对不同海区海温异常及其变化趋势对东亚夏季风的影响及
请下载后查看,本文暂不支持在线获取查看简介。 Please download to view, this article does not support online access to view profile.
在对淮河流域降水气候特征分析的基础上,该文研究了该区域夏季降水异常特征以及导致异常的原因,并侧重于北太平洋研究了海温异常对淮 河流域降水异常的影响,初步探讨可能的
云是地球系统内部最为重要的调节因子之一,对地气系统的辐射能量平衡和水循环都具有重要的贡献。同时,云是天气/气候数值模式模拟中的难点,亦是造成模式结果不确定性的最主要来
3月,农业部印发《2011年春季主要作物科学施肥指导意见》的通知,其中,对长江中下游地区双季早稻提出施肥原则:适当降低氮肥总用量,增加穗肥比例;基肥深施,追肥“以水带氮”;
该文力图用百线性动力学的研究手段揭示室内气流运动的复杂结构.分析理解实际问题的物理根源,将非线性动力学理论应用于室内空气流动的研究工作在国内外还很缺乏.该文考虑2维
论文首先用NCEP再分析资料分析了南海海气热交换场的时空特征、南海海区海气热交换与南海季风的关系以及南海海气相互作用对中国东南部夏季降水的影响等问题.然后使用NCEP再