论文部分内容阅读
主要论述了一种高精度的原子力显微镜AFM.IPC-208B型机在分子形态学方面的应用研究.以磁控溅射获得的TiN薄膜为例,从原子力显微镜测得的三维图上探析该TiN薄膜的优先生长面及其在优先生长面上的原子排布.实验不仅鉴定了测试材料的微观形态,也充分肯定了该原子力显微镜原子量级的精度及其在微观结构领域的潜在发展,为该机应用于微加工领域奠定了基础.
This paper mainly discusses the application of AFM.IPC-208B high-precision atomic force microscope in molecular morphology.With TiN film obtained by magnetron sputtering as an example, the TiN The preferred growth surface of the film and the arrangement of the atoms on the preferential growth surface The experiment not only identifies the microscopic morphology of the test material but also fully affirms the atomic order accuracy of the atomic force microscope and its potential development in the microstructure field Machine applied to the field of micro-machining laid the foundation.