本文应用 X 射线电子能谱(XPS)、穆斯堡尔谱和电学测量研究~(57)Fe 注入氧化铝陶瓷的表面电性能和结构,及其热退火的影响.结果表明,注入层的电阻率大大降低,同时,注入剂量较高和退火温度适宜可以达到改善材料的表面电导性能.注入的铁以 Fe~(3+)、Fe~(2+)和 Fe°三种价态存在.并且,经退火后这些价态的相对比例发生变化.最后,简短地讨论了样品注入层的导电机理. In this paper, the surface electrical properties and structure of ~ (57) Fe-infused alumina ceramics were studied by X-ray photoelectron spectroscopy (XPS), Mossbauer spectroscopy and electrical measurements.The results show that the resistance of the implanted layer At the same time, the higher conductivity and annealing temperature can improve the surface conductivity of the material.The injected iron exists in three valence states of Fe 3+, Fe 2+ and Fe 3. , The relative proportions of these valence states change after annealing.Finally, the conduction mechanism of the sample injection layer is briefly discussed.