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采用溶剂蒸发对流自组装法将单分散二氧化硅(SiO2)微球组装形成三维有序胶体晶体模板,以锗烷(GeH4)为先驱体气用等离子增强化学气相沉积法在350℃填充高折射率材料锗,获得了锗反蛋白石光子晶体。通过扫描电镜、X射线衍射仪对锗反蛋白石的形貌、成分、结构进行了表征。结果表明:锗在SiO2微球空隙内填充均匀,得到的锗为多晶态。锗反蛋白石光子晶体为三维有序多孔结构。等离子体增强化学气相沉积的潜在优势在于可实现材料的低温填充,从而以高分子材料为模板进行复型,得到多种结构的三维光子晶体。
The monodisperse silica (SiO2) microspheres were assembled by solvothermal convection self-assembly to form a three-dimensional ordered colloidal crystal template. GeH4 was used as the precursor gas and plasma-enhanced chemical vapor deposition The germanium-anti-opal photonic crystal is obtained by rate germanium material. The morphology, composition and structure of germanium inverse opal were characterized by scanning electron microscopy and X-ray diffraction. The results show that germanium is uniformly filled in the pores of SiO2 microspheres, and the obtained germanium is polycrystalline. Germanium anti-opal photonic crystal is a three-dimensional ordered porous structure. The potential advantage of plasma-enhanced chemical vapor deposition lies in the fact that low-temperature filling of the material can be achieved, so that the multi-structured three-dimensional photonic crystal can be obtained by complexing the polymer material as a template.