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提出了一种可工作于室温环境下的微型气动红外传感器,它基于气体吸收特定波段的红外辐射后产生的一系列热效应为物理基础,可获得包含红外辐射源信息的信号。为深入研究热效应所产生的微热信号对器件整体性能的控制和影响,优化器件的几何结构和行为,建立了符合器件工作机制的经典热传输模型,并在此基础上,利用通用商业有限元模拟软件ANSYS/FLORTRAN进行流体-结构耦合分析,获得了微型腔体温度,流-固界面压力分布情况以及薄膜的弹性形变,掌握了微结构的机械特性以及流畅的热输运特性。
A miniature pneumatic infrared sensor which can work at ambient temperature is proposed. It is based on the physical basis of a series of thermal effects generated by gas absorption of infrared radiation in a specific wavelength range, and can obtain signals containing information of infrared radiation sources. In order to further study the control and influence of the micro-thermal signal generated by the thermal effect on the overall performance of the device, and to optimize the geometry and behavior of the device, a classical heat transfer model is established based on the working mechanism of the device. Based on this, The simulation software ANSYS / FLORTRAN was used to analyze the fluid-structure coupling. The microchamber temperature, the pressure distribution at the flow-solid interface and the elastic deformation of the film were obtained. The mechanical properties of the microstructure and the smooth heat transport characteristics were obtained.