论文部分内容阅读
出版社:化学工业出版社出版时间:2013-10-01ISBN:9787122176820所属分类:图书>工业技术>自动化技术产品检测在半导体、精密制造、包装印刷等行业应用广泛且需求迫切,但检测手段一直在离线检测(如工具显微镜、投影测量仪和体视显微镜等传统设备)或人工检测的技术中徘徊。近些年随着产品的高档化和微型化,加工订单的国际化,对检测的要求越来越高,精度从0.01mm向0.001mm过渡,计量
Publishing House: Chemical Industry Press Publication date: 2013-10-01 ISBN: 9787122176820 Category: Books> Industrial Technology> Automation Technology Product testing in the semiconductor, precision manufacturing, packaging and printing industries are widely used and the demand is pressing, but the detection means has been Off-line testing (traditional tools such as tool microscopes, projection gauges, and stereo microscopes) or manual inspection techniques can hover. In recent years, with the product of high-grade and miniaturization, the internationalization of processing orders, the testing requirements are getting higher and higher accuracy from 0.01mm to 0.001mm transition, measurement