A compact ammonia gas sensor with two gas chambers is proposed in this paper, whose core sensing device is a U-bending microring resonator. The waveguides of ring part and feedback part in this resonator are made of silicon on insulator (SOI) ridge wavegu
In order to suppress the effect of the temperature variation on the wavefront of the laser communication terminal, the secondary mirror support with flexure hinges is designed. The series-wound straight-circle flexure hinge is designed to achieve the maxi