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在激光二极管(LD)正弦相位调制(LD-SPM)干涉仪中,通过注入电流调制激光二极管波长的同时,光源输出的光强也被调制,成为测量误差的主要来源之一.提出一种新的消除激光二极管正弦相位调制干涉仪中光强调制影响的干涉仪,给出了具体的理论分析.该干涉仪采用全光纤结构,有效减小外界干扰对干涉测量的影响;采用容易实现的前置信号处理电路和实时相位检测器对干涉信号进行处理,消除了激光二极管光强调制产生的测量误差;同时实现了物体微小位移的高精度实时测量,测量的重复精度达到1 nm.实验结果与其他消除光强调制影响的方法测得的结果基本一致,验证了该方法的实用性.
In the laser diode (LD) sine-phase modulation (LD-SPM) interferometer, the intensity of light output from the light source is also modulated by injecting a current into the laser diode wavelength, which is one of the main sources of measurement error. The interferometer with the effect of modulating the intensity of light in the sinusoidal phase modulation interferometer of the laser diode is given.The theoretical analysis is given.The interferometer uses the all-fiber structure to reduce the influence of external interference on the interferometry effectively, The signal processing circuit and the real-time phase detector are used to process the interference signals to eliminate the measurement error caused by the laser intensity modulation of the laser diode. At the same time, the real-time measurement of small displacement of the object is realized with the repeatability of 1 nm. Other methods to eliminate the effect of light intensity modulation measured the results are basically the same, verify the practicality of the method.