扫描隧道显微镜(STM)是80年代初研制成功的一种新型表面分析仪器,现已在物理、化学、生物等领域获得了广泛应用.与扫描电子显微镜(SEM)、透射电子显微镜(TEM)及场离子显微镜(FIM)相比,STM具有结构简单、分辨率高、样品制备方便等特点.STM的横向分辨率可超过0.1nm,纵向分辨率可达0.01nm,因而STM适用于观察样品表面微观结构以及由于微观缺陷的存在而引起的原子尺度的起伏,如表面台阶、界面等.目前STM已成功地用于石墨中碳原子及单晶硅表面7×7结构的直接观察.用STM研究金属材料表面的精细组织结构,可有效地填补其它分析手段的不足,但至今由于实验技术及仪器本身的局限,扫描隧道 Scanning tunneling microscope (STM) is a new type of surface analysis instrument successfully developed in the early 1980s, and has been widely used in the field of physics, chemistry, biology, etc. Compared with scanning electron microscopy (SEM), transmission electron microscopy (TEM) Compared with field ion microscope (FIM), STM has the advantages of simple structure, high resolution and convenient preparation of samples, etc. STM can be used for observing the microstructure of sample surface with horizontal resolution of more than 0.1nm and vertical resolution of 0.01nm Structure and atomic scale fluctuations caused by the existence of micro-defects, such as surface steps, interfaces, etc. At present, STM has been successfully used for the direct observation of the 7 × 7 structure of carbon atoms in the graphite and single crystal silicon surface. Fine structure of the material surface, which can effectively fill the gaps in other analytical tools, but so far due to the limitations of experimental technology and equipment, scanning tunnel