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为了提高光刻机工件台中微动台的运动精度和加速度,设计了一种将支承和驱动在同一电磁单元中实现的新型Lorentz电机驱动、磁悬浮支承、并联、6自由度微动台结构,应用解析方法建立了微动台磁场模型和特定结构约束下的磁场分布。对微动台电磁力-位移特性进行了分析。采用数值方法计算了微动台电磁单元绕组损耗引起的温升。结果表明:该微动台具有驱动力大、结构简单、散热方便等优点,可为我国自主产权光刻机微动台设计提供参考。
In order to improve the precision and acceleration of the micro-motion stage in the lithography machine table, a novel Lorentz motor-driven, maglev support, parallel and 6-DOF micro-table structure that supports and drives in the same electromagnetic unit is designed. The analytical method establishes the magnetic field model and the magnetic field distribution under the constraint of specific structure. The electromagnetic force-displacement characteristics of the moving table are analyzed. The temperature rise caused by winding loss of micro-electromagnet unit is calculated by numerical method. The results show that the micro-motion platform has the advantages of large driving force, simple structure and convenient heat dissipation. It can provide a reference for the design of micro-motion platform for China’s proprietary lithography machine.