采用薄膜工艺制得的薄膜型敏感元件由于具有体积小、功耗低,便于大规模生产,产品一致性较好,成本低廉等特点,因而近年来日益受到人们的重视,成为敏感元件中一个重要的类别。本文阐述几种薄膜敏感元件的结构和制造工艺,并介绍了所用的薄膜成膜方法,包括真空蒸发、溅射与反应溅射工艺。 In recent years, the thin-film type sensing elements made by the thin-film technology have attracted more and more attentions because of their small size, low power consumption, easy mass production, good product consistency and low cost, making them an important element in sensitive components Category. This article describes the structure and manufacturing process of several thin-film sensing elements, and describes the thin film deposition methods used, including vacuum evaporation, sputtering and reactive sputtering.