提出一种基于近似模型的MEMS系统级优化方法,给出具体实现流程,并结合一个y轴微机械陀螺进行优化。该方法解决了如何得到近似优化目标函数表达式的关键问题。所得的y轴微机械陀螺优化参数,使得陀螺驱动模态谐振频率fx和检测模态谐振频率fz分别为3 074 Hz和2 998 Hz,两者之间相差7 6 Hz,较好的实现了模态匹配,且都在3 000 Hz的设计要求附近,约束条件也得到了满足。该优化方法为在MEMS设计中快速获得系统级优化方案提供较好参考。 A MEMS-based system-level optimization method based on approximate model is proposed. The specific implementation flow is given, and a y-axis MEMS gyroscope is optimized. This method solves the key problem of how to get the approximate expression of optimization objective function. The optimized parameters of the y-axis MEMS gyroscope are such that the gyro-driven mode resonance frequency fx and the detected mode resonance frequency fz are respectively 3 074 Hz and 2 998 Hz, with a difference of 76 Hz State matching, and are all around the design requirements of 3 000 Hz, the constraints have also been met. This optimization method provides a good reference for quickly obtaining system-level optimization solutions in MEMS design.