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微片激光器具有极高的光回馈敏感度,在回馈测量技术中占据重要地位。准共路激光回馈干涉技术在保持了微片激光器的高光回馈灵敏度以及外差式光回馈相位测量方法的高分辨率等优点的同时,通过频率复用技术消除了回馈干涉仪的空程带来的负面影响,大幅度地提高了回馈干涉仪的抗环境干扰能力。它可以进行非配合目标的非接触式精密位移测量,从而填补了现有激光干涉仪在精密位移测量应用方面的一个空白。通过与Agilent5529A双频激光干涉仪多次比对,得到回馈干涉仪目前达到的指标为:线性度优于3×10-5,量程50 mm,标准差在200 nm左右。
Microplate lasers have an extremely high optical feedback sensitivity and hold an important place in feedback measurement technology. The quasi-common-mode laser feedback interference technology eliminates the feedback gap of the feedback interferometer through the frequency reuse technology while keeping the advantages of the high light feedback sensitivity of the microchip laser and the high resolution of the heterodyne optical feedback phase measurement method The negative impact greatly improves the anti-interference capability of the feedback interferometer. It can perform non-contact precision displacement measurement for non-cooperating targets, thus filling the gap of existing laser interferometers in precision displacement measurement applications. By comparing with the Agilent5529A dual-frequency laser interferometer multiple times, the current performance of the feedback interferometer is as follows: the linearity is better than 3 × 10-5, the range is 50 mm, and the standard deviation is about 200 nm.