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When interference microscop e measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the in terference images become slur for the measured object if there has small interfe rence after clear focus. The auto-focusing system is introduced into the interf erence microscope, the system can obtain high definition interference image rapi dly, and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ±150 μm, auto-focusing precision of ±0.3 μm, auto-focusing time of 4~8 s.
When interference microscop e measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the in terference images become slur for the measured object if there has small interfe rence after clear focus. The auto-focusing system is introduced into the interf erence microscope, the system can obtain high definition interference image rapi dly, and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ± 150 μm, auto- Focus precision of ± 0.3 μm, auto-focusing time of 4 ~ 8 s.