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为实现亮度均匀、形状对称、高对称光束质量的高功率半导体激光输出,提出了一种基于mini-bar芯片的高功率光纤耦合系统设计方案,使用Zemax设计了一套针对200μm/NA0.22多模光纤的500 W级光纤耦合输出系统。设计使用反射镜-条纹镜系统实现单列叠层微通道封装芯片快轴方向光束的尺寸压缩,并结合偏振合束技术在不改变光束束参积的条件下将功率提高一倍,并使用慢轴扩束系统压缩慢轴方向发散角,最后采用非球面透镜耦合进目标光纤。在设计的基础上采用4列叠层微通道封装的叠阵(每列包含5个mini-bar芯片)进行了等效验证实验,在注入电流为37 A时得到稳定输出功率506 W的小型化模块,亮度达10.3 MW/(cm~2·sr),电光效率为43.0%。设计和实验共同表明,该光纤耦合模块可实现500 W稳定功率输出,可广泛应用在光纤/固体激光泵浦及工业加工等领域。
In order to realize high-power semiconductor laser output with uniform brightness, symmetrical shape and high symmetry beam quality, a design scheme of high-power fiber coupling system based on mini-bar chip is proposed. Zemax is used to design a set of high- 500 W fiber-coupled optical fiber output system. The design of the mirror-stripe mirror system is used to realize the dimension compression of the beam in the fast axis direction of the single-stack microchannel packaged chip and to combine the polarization combining technique to double the power without changing the parameter of the beam bundle. The slow axis The beam expander system compresses the divergence angle in the slow axis direction, and finally the aspherical lens is used to couple into the target optical fiber. An equivalent verification experiment was performed on a design basis using four stacked microchannel stacks (five mini-bar chips in each column) to achieve a stable output of 506 W at an injection current of 37 A Module, the brightness of 10.3 MW / (cm ~ 2 · sr), electro-optical efficiency of 43.0%. The design and experiment show that the fiber coupling module can achieve 500W stable power output, which can be widely used in the field of optical fiber / solid-state laser pumping and industrial processing.