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为了突破传统微电子芯片的散热限制和克服超级计算机运算能耗高的困难,低功耗电路已经成为信息计算领域研究的热点问题.近来,Nb基超导数字电路在低功耗电路中显现出比其它方案更有优势的前景.Josephson结的质量在超导数字电路的动态功耗中起着关键的作用.我们采用双层正胶光刻和NR9-3000PY负胶光刻,实现了适用于Nb基Josephson器件的自对准剥离工艺.性能稳定的Josephson结和直流超导量子干涉仪DC-SQUID被制备出来,在不同温度下进行了电学性能测试.不同面积的欠阻尼结具有一致的临界电流密度Jc,在2.54K时约400A/cm2.通过片上施加控制电流的方式,观测了DC-SQUID零电压态跳变电流随磁场的调制效应.
In order to overcome the heat dissipation limit of conventional microelectronic chips and overcome the high energy consumption of supercomputers, low-power circuits have become a hot issue in the field of information computation. Recently, Nb-based superconducting digital circuits have emerged in low power circuits Joseph junction quality plays a key role in the dynamic power dissipation of superconducting digital circuits.We use double-layer positive photoresist and NR9-3000PY negative-tone lithography to achieve a Self-Aligned Peeling Process of Nb-Based Josephson Devices A stable Josephson junction and DC-SQUID quantum interference device were fabricated and tested for electrical properties at different temperatures.The under-damped junctions of different areas have a consistent criticality The current density Jc is about 400 A / cm2 at 2.54 K. The modulation effect of the DC-SQUID zero-voltage state transition current with the magnetic field is observed by applying the control current on-chip.