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采用近空间升华法分别在玻璃、CdS及CdS1-xTex衬底上沉积了CdTe多晶薄膜,通过原子力显微镜的观察和X射线衍射的分析,比较了它们的微结构。结果表明,用CdS和CdS1-xTex多晶薄膜作为衬底沉积的CdTe多晶薄膜结构与衬底相似,具有(111)面择优取向。通过对在不同氧分压下进行后处理的CdS/CdTe薄膜的断面及光能隙的研究,发现在氮氧(4∶1)气氛下后处理的薄膜CdS层明显减薄,这样的结果有利于改善CdTe太阳电池的光谱响应,增加载流子收集。我们认为氧在退火中促进了CdS/CdTe界面互扩散,扩散的结果不仅弥补了CdS、CdTe间的晶格失配,而且降低了界面的位错密度,并获得了面积为0.52 cm2,转换效率为13.38%的CdTe多晶薄膜电池。
CdTe thin films were deposited on glass, CdS and CdS1-xTex substrates respectively by near-space sublimation method. Their microstructures were compared by atomic force microscopy and X-ray diffraction. The results show that the CdTe and CdS1-xTex polycrystalline thin films are similar to the substrate and have the preferred orientation of (111) plane. The study of the cross-section and the optical energy gap of the CdS / CdTe thin films treated at different partial pressures of oxygen showed that the post-treated thin film CdS layers were significantly thinned under the nitrogen-oxygen (4: 1) atmosphere, and as a result, Conducive to improving the spectral response of CdTe solar cells, increasing carrier collection. We believe that oxygen promotes interdiffusion of CdS / CdTe interface during annealing. The result of diffusion not only makes up for the lattice mismatch between CdS and CdTe, but also reduces the dislocation density at the interface and obtains an area of 0.52 cm2. The conversion efficiency 13.38% of CdTe polycrystalline thin-film batteries.