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一、引言迈克耳逊型白光干涉仪的分光镜和补偿镜是面形精度、厚度尺寸、对应角度要求极高的配对楔形板。通常,楔形板各面的平面性偏差不低于λ/20;两板的对应厚度为0.01毫米;两板的楔形角为10＇时,其对应角差不大于1〃。由于干涉光束多次通过两板的玻璃层,因此,影响补偿镜性能的因素,除板的厚度尺寸和面形偏差,还有玻璃的折射率。所以,要获得优质的补偿板,必须对楔形板的对应角进行干涉检测。一般用激光平面干涉仪可以检测小于5＇以下的小角度,在检测5＇以上的小角度,
I. INTRODUCTION The Michelson-type white-light interferometer spectroscope and compensation mirror is the surface shape accuracy, thickness size, the corresponding angle of the mating wedge plate. Normally, the flatness of each side of the wedge is not less than λ / 20; the corresponding thickness of the two plates is 0.01 mm; and the wedge angle of the two plates is 10 ’, the corresponding angle difference is not more than 1 ". As the interference beam passes through the glass layers of the two plates several times, the factors affecting the performance of the compensating mirror, in addition to the thickness and surface profile deviations of the plates, and the refractive index of the glass. Therefore, to obtain a good compensation plate, the corresponding angle wedge plate must be interference detection. General laser plane interferometer can detect less than 5 ’the following small angle in the detection of 5’ above the small angle,