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作为一种新型聚合物微结构成形方法,超声波压印具有成形速度快和基片整体变形小的特点,但是微结构在较大面积成形时存在均匀性较差的问题.本文面向微流控芯片中微沟道的超声波压印成形,通过设计正交实验和有限元仿真研究的方法,分析了超声压印工艺参数对微流控芯片成形质量和均匀性的影响原因及规律.结果表明,可以通过优化超声波压印压力、振幅和超声波作用时间提高压印均匀性,其中超声波压印压力对成形精度和均匀性的影响最大.采用优化后的工艺参数进行实验,在48 mm×32 mm面积的PMMA微流控芯片基片上成形了微沟道,微沟道的复制精度优于95.6%,片上3点的均匀性为98.0%.
As a new type of polymer microstructure forming method, ultrasonic imprinting has the characteristics of fast forming speed and small deformation of the whole substrate, but the microstructure has the problem of poor uniformity in the forming of large area.In this paper, The effects of ultrasonic embossing process parameters on the forming quality and uniformity of microfluidic chips were analyzed by means of orthogonal experiment and finite element simulation design.The results showed that The printing uniformity was improved by optimizing the pressure, amplitude and ultrasonic action time of ultrasonic imprinting, in which ultrasonic imprinting pressure had the greatest influence on the forming precision and uniformity.According to the optimized process parameters, in the area of 48 mm × 32 mm The microchannels are formed on the substrate of PMMA microfluidic chip, the precision of microchannel replication is better than 95.6%, and the uniformity of on-chip 3-point is 98.0%.