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首先,介绍了碳纳米管电子器件应用中的关键工艺技术——碳纳米管与外电路的连接技术,回顾了碳纳米管与外电路装配的发展历程。从碳纳米管在电极间的随机连接到电场定位组装和原子力显微镜的可控操纵,描述了各种装配方法的特点。其次,讨论了碳纳米管与外电路连接的可靠性问题,并介绍了电子束、扫描探针显微镜和超声波等多种改善接触性能的焊接方法。最后,简单展望了碳纳米管与外电路连接的发展趋势,指出数目可控的碳纳米管组装技术和规模化的焊接工艺是今后研究工作的重点。
First of all, the key technology in the application of carbon nanotube electronic devices - the connection technology between carbon nanotubes and external circuits is introduced. The development history of the assembly of carbon nanotubes and external circuits is reviewed. From the random connection of carbon nanotubes in the electrodes to the electric field positioning and assembly and the controllability of atomic force microscopy, the characteristics of various assembly methods are described. Secondly, the reliability of the connection between carbon nanotubes and external circuits is discussed. Several welding methods are also introduced to improve the contact performance, such as electron beam, scanning probe microscope and ultrasonic. Finally, the trend of the connection between carbon nanotubes and external circuits is briefly discussed. It is pointed out that the number of carbon nanotubes assembly technology and the large-scale welding process are the key points in the future research work.